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Line Heater×ヒロテック - List of Manufacturers, Suppliers, Companies and Products

Line Heater Product List

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High Purity Quartz Inline Heater

High Purity Quartz Inline Heater

Uses high-purity quartz. An inline heater boasting high efficiency, long lifespan, and high reliability.

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

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SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

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High Purity Quartz Inline Heater ACCUHEAT(R)

High Purity Quartz Inline Heater ACCUHEAT(R)

High Purity Quartz Inline Heater ACCUHEAT(R)

UL certified and CE marked, compliant with SEMI S2/S3 High purity quartz inline heater 【Features】 ○ Inline heater using Inconel heater ○ Exterior made of Teflon (PTFE) ○ Does not reach high temperatures, so nitrogen purge and CDA cooling devices are unnecessary ○ Excellent pressure resistance (4.2 Kg/cm²) ○ Compact size ○ Can be installed both vertically and horizontally ○ Diverse lineup ranging from 3 kW to 18 kW ● For other functions and details, please download the catalog.

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